“Scalable high-precision tuning of photonic resonators by resonant cavity-enhanced photoelectrochemical etching,” [Nature Comms, 8, 14267, 2017]
False color SEM of three micron-sized microdisks coupled to a common optical waveguide. Light-assisted etching allows the effective radius of these three resonators to be made identical to within less than one atom.
Christopher G. Baker 